Brooks Corporation focuses on the development and delivery of automation solutions for the semiconductor and life science industries. The company's core activity includes providing wafer handling robots, factory automation solutions, asset tracking and RFID solutions, as well as contamination control systems for semiconductor manufacturing. Additionally, Brooks also offers solutions for the life science industry, including laboratory automation and process optimization.
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Automation solutions for semiconductor manufacturing
Automation solutions for manufacturers focused on wafer transport, low-contamination material handling, packaging, reticle management and fab-side process stability.
Vacuum automation
Precise, reliable substrate transport in vacuum and controlled manufacturing environments with vacuum robots, modular vacuum systems and load port platforms.
Advanced Packaging Automation
Automation for complex substrates and changing packaging processes with adaptive handling, sorting and vision-based adjustment in real time.
Contamination control
Inspection, cleaning, metrology and closed-loop contamination control for FOUPs, reticle pods and carriers to reduce defects and yield losses.
Reticle management & lithography
Storage, protection, handling and tracking of reticles in controlled environments to ensure availability, integrity and lithography performance.
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