Brooks Corporation focuses on the development and delivery of automation solutions for the semiconductor and life science industries. The company's core activity includes providing wafer handling robots, factory automation solutions, asset tracking and RFID solutions, as well as contamination control systems for semiconductor manufacturing. Additionally, Brooks also offers solutions for the life science industry, including laboratory automation and process optimization.
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Automation solutions for semiconductor manufacturing
Automation solutions for manufacturers focused on wafer transport, low-contamination material handling, packaging, reticle management and fab-side process stability.
Vacuum automation
Precise, reliable substrate transport in vacuum and controlled manufacturing environments with vacuum robots, modular vacuum systems and load port platforms.
Advanced Packaging Automation
Automation for complex substrates and changing packaging processes with adaptive handling, sorting and vision-based adjustment in real time.
Contamination control
Inspection, cleaning, metrology and closed-loop contamination control for FOUPs, reticle pods and carriers to reduce defects and yield losses.
Reticle management & lithography
Storage, protection, handling and tracking of reticles in controlled environments to ensure availability, integrity and lithography performance.
Interface Automation
Interface automation for wafers, reticles, substrates and carriers with load ports, SMIF/Versaport and identification systems for stable tool integration.
Labor automation
Flexible laboratory automation solutions for sample handling, instrument loading, tube decapping, sealing, autosampling and modular workflow automation.
Industrial automation
Flexible robotics and automation for industrial manufacturing environments with pick-and-place, machine tending, parts transfer and collaborative work cells.
Service
Lifecycle services for installation, maintenance, upgrades, repair, refurbishment, diagnostics and spares to ensure uptime and system lifetime.
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