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Idonus Sàrl

Summary

About the company

Idonus Sàrl is a microtechnology company specializing in the design and manufacture of specialty equipment for MEMS and microfabrication. Its product portfolio includes UV-LED photolithography exposure systems, HF vapor phase etchers, infrared inspection microscopes, electrostatic and wet-process wafer chucks, and the company provides custom engineering, prototyping/small-series production and ion implantation services/machines.

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Products & services

Industry:Mechanical Engineering Industry

✓ Offered10

MEMS devices for microfabrication and inspection

Cleanroom equipment for MEMS microfabrication and inspection, including Mask Alignment, photolithography exposure, HF vapor-evaporation systems, wafer inspection and wafer bonding inspection.

UV-LED exposure systems for photolithography

UV-LED exposure systems from the UV-EXP series, including an entry-level model, custom configurations, retrofits for mask aligners, and complete PLX systems with alignment and exposure.

Engineering services and prototyping

Engineering services for custom solutions as well as prototyping and small-batch production with short lead times and adaptation of existing products to customer specifications.

HF vapor-phase etcher

HF-VPE systems for etching silicon-based components, with variants for different wafer sizes as well as custom-derived models and accessories.

Ion implantation systems and surface treatment

Surface treatment using ion implantation, including services as well as development and manufacturing of special machines based on this technology.

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Idonus Sàrl

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Idonus Sàrl

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