The core activity of VAT Group AG is the development and manufacture of high-vacuum solutions, in particular vacuum valves and systems, which are essential for the production of semiconductors, displays and digital technologies.
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High-performance vacuum valves for vacuum processes up to high vacuum, ultrahigh vacuum and extreme high vacuum; custom-manufactured for isolation, control, gas dosing, transfer and venting.
Vacuum solutions
Application-specific vacuum solutions for semiconductors, displays, research, scientific instruments, coating, solar cells, industry, and medical and pharmaceutical applications.
Product services
Upgrade and retrofit solutions, spare parts, standard repair service, Fixed Price Refurbishment and service centres to extend performance and service life of the systems.